IP Library › Granted Patent US 6,809,809
Granted Patent Utility
US 6,809,809 · Confirmation No. 5909

OPTICAL METHOD AND APPARATUS FOR INSPECTING LARGE AREA PLANAR OBJECTS

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Quick Facts
Patent No.
US 6,809,809
App. No.
10/379,016
Filed
2003-03-04
Granted
2004-10-26
Pub. No.
US20040012775A1
Art Unit
2877
PTA
-189 days