Patent Assignment
Reel/Frame 025929/0989
Assignment of Assignor's Interest
Recorded: 2011-03-09
Pages: 7
Assignor
REAL TIME METROLOGY INC.
Executed: 2010-12-09
Assignee
NANOMETRICS INCORPORATED
1550 BUCKEYE DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(3)
Optical Inspection Module and Method for Detecting Particles and Defects on Substrates in Integrated Process Tools
Patent:
5,909,276 →
Application:
09/050,267 →
Optical Method and Apparatus for Inspecting Large Area Planar Objects
Optical Method and Apparatus for Inspecting Large Area Planar Objects
Related Assignments
(5)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 19, 1998
From: KINNEY, PATRICK D.; RAO, NAGARAJA P.
To: MICROTHERM, LLC
Reel/Frame 009272/0924 →
Assignment of Assignor's Interest
Jul 11, 2003
From: RAO, NAGARAJA P.; KINNEY, PATRICK D.
To: REAL TIME METROLOGY, INC.
Reel/Frame 014263/0773 →
Assignment of Assignor's Interest
Jul 17, 2003
From: KINNEY, PATRICK D.; GUPTA, ANAND; RAO, NAGARAJA P.
To: REAL TIME METROLOGY, INC.
Reel/Frame 014296/0653 →
Merger
Jun 24, 2010
From: MICROTHERM, LLC
To: REAL TIME METROLOGY, INC.
Reel/Frame 024588/0034 →
Change of Name
Apr 30, 2020
From: NANOMETRICS INCORPORATED
To: ONTO INNOVATION INC.
Reel/Frame 052544/0224 →