Granted Patent
Utility
US 6,630,996 · App. 09/994,021
Optical method and apparatus for inspecting large area planar objects
Inventors:
Nagaraja Rao, Patrick Kinney
Patented Case
View Patent ↗
Granted: Oct 7, 2003
Filed: Nov 14, 2001
Inventors
Nagaraja Rao
Patrick Kinney
Assignee (at issue)
Real Time Metrology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.