Patent Assignment
Reel/Frame 009272/0924
Assignment of Assignor's Interest
Recorded: 1998-06-19
Pages: 3
Assignee
MICROTHERM, LLC
2404 E. HENNEPIN AVENUE, MINNEAPOLIS, MINNESOTA, 55413
Covered Property
(1)
Optical Inspection Module and Method for Detecting Particles and Defects on Substrates in Integrated Process Tools
Patent:
5,909,276 →
Application:
09/050,267 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.