Patent Application
Provisional
App. No. 60/382,204
· Confirmation No. 6644
Method for reducing gaseous chemical cross-contamination during wafer transport in a semiconductor processing tool
Provisional Application Expired
Inventors
Prosecution
- Docket No.
- ASMEX.310PR
- Confirmation No.
- 6644
Child
Claims priority from a provisional application
→
App. 10/786,779
· US 7,022,613
Filed 2004-02-24
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2003/015843
Filed 2003-05-20
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 10/441,642
· US 6,797,617
Filed 2003-05-20
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/382,204
- Filed
- 2002-05-21
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