IP Library › Granted Patent US 6,797,617
Granted Patent Utility
US 6,797,617 · Confirmation No. 2748

REDUCED CROSS-CONTAMINATION BETWEEN CHAMBERS IN A SEMICONDUCTOR PROCESSING TOOL

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2007-06-11 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2005-12-09 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-07-01 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-07-01 1449 List of References cited by applicant and considered by examiner 1 View
2004-01-12 IFEE Issue Fee Payment (PTO-85B) 3 View
2003-12-30 RUSH Printer Query form, used by the publications branch 2 View
2003-11-10 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-11-10 FOR Foreign Reference 38 View
2003-10-15 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-10-15 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-10-15 1449 List of References cited by applicant and considered by examiner 1 View
2003-10-15 892 List of references cited by examiner 1 View
2003-10-15 CLM Claims 4 View
2003-10-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-10-15 FWCLM Index of Claims 1 View
2003-10-15 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-29 SRNT Examiner's search strategy and results 2 View
2003-06-12 LET. Miscellaneous Incoming Letter 1 View
2003-06-12 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-05-20 TRNA Transmittal of New Application 3 View
2003-05-20 SPEC Specification 12 View
2003-05-20 CLM Claims 4 View
2003-05-20 ABST Abstract 1 View
2003-05-20 DRW Drawings-only black and white line drawings 4 View
2003-05-20 OATH Oath or Declaration filed 8 View
2003-05-20 WFEE Fee Worksheet (SB06) 1 View
2003-05-20 WFEE Fee Worksheet (SB06) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,797,617
App. No.
10/441,642
Filed
2003-05-20
Granted
2004-09-28
Pub. No.
US20030219977A1
Art Unit
2812
PTA
0 days