Patent Assignment
Reel/Frame 014159/0968
Assignment of Assignor's Interest
Recorded: 2003-05-20
Pages: 5
Assignors
POMAREDE, CHRISTOPHE
Executed: 2003-05-19
SHERO, ERIC J.
Executed: 2003-05-19
JYLHA, OLLI
Executed: 2003-05-19
Assignee
ASM AMERICA, INC.
3440 E. UNIVERSITY DRIVE, PHOENIX, ARIZONA, 85034-7200
Covered Property
(1)
Reduced Cross-Contamination Between Chambers in a Semiconductor Processing Tool
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.