IP Library › Patent Application 60387109
Patent Application Provisional Small
App. No. 60/387,109 · Confirmation No. 9587

Automation design for cassette-less transfer of silicon wafers

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2002-06-07 TRNA Transmittal of New Application 2 View
2002-06-07 SPEC Specification 2 View
2002-06-07 CLM Claims 2 View
2002-06-07 DRW Drawings-only black and white line drawings 4 View
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Quick Facts
App. No.
60/387,109
Filed
2002-06-07