IP Library › Patent Application 60408264
Patent Application Provisional
App. No. 60/408,264 · Confirmation No. 2134

Overlay measurement by means of phase contrast between proximate diffraction gratings

Inventor: Kenneth Johnson
Provisional Application Expired
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 Code Description Pages PDF
2002-09-05 TRNA Transmittal of New Application 2 View
2002-09-05 SPEC Specification 7 View
2002-09-05 CLM Claims 1 View
2002-09-05 DRW Drawings-only black and white line drawings 4 View
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Quick Facts
App. No.
60/408,264
Filed
2002-09-05