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App. No. 10/639,661 · Confirmation No. 6838

Interferometry-based method and apparatus for overlay metrology

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2006-02-28 ABN Abandonment 2 View
2005-08-02 CTNF Non-Final Rejection 8 View
2005-08-02 1449 List of References cited by applicant and considered by examiner 1 View
2005-08-02 892 List of references cited by examiner 1 View
2005-08-02 BIB Bibliographic Data Sheet 1 View
2005-08-02 SRFW Search information including classification, databases and other search related notes 1 View
2005-07-27 SRNT Examiner's search strategy and results 2 View
2004-09-03 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2004-09-03 BIB Bibliographic Data Sheet 1 View
2004-08-03 PA.. Power of Attorney 2 View
2004-06-21 C.AD Change of Address 1 View
2003-11-24 OATH Oath or Declaration filed 6 View
2003-11-10 PEFN Pre-Exam Formalities Notice 2 View
2003-08-12 TRNA Transmittal of New Application 4 View
2003-08-12 SPEC Specification 16 View
2003-08-12 CLM Claims 3 View
2003-08-12 ABST Abstract 1 View
2003-08-12 DRW Drawings-only black and white line drawings 5 View
2003-08-12 OATH Oath or Declaration filed 3 View
2003-08-12 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-08-12 FOR Foreign Reference 20 View
2003-08-12 WFEE Fee Worksheet (SB06) 1 View
2003-08-12 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/639,661
Filed
2003-08-12
Pub. No.
US20040066517A1
Art Unit
2877