Assignment of Assignor's Interest

Recorded: 2003-11-24 Pages: 7

Assignors

HUANG, HSU-TING

Executed: 2003-08-18

SEZGINER, ABDURRAHMAN

Executed: 2003-08-15

JOHNSON, KENNETH

Executed: 2003-08-25

NORTON, ADAM

Executed: 2003-08-15

Assignee

THERMA-WAVE, INC.

1250 RELIANCE WAY, FREMONT, CALIFORNIA, 94539

Covered Property (1)

Interferometry-based method and apparatus for overlay metrology

Application: 10/639,661 →

Publication: US 2004/0066517

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.