Patent Application
Provisional
Small
App. No. 60/416,084
· Confirmation No. 4005
Methods and apparatus for remote plasma cleaning with improved gas delivery lid assemblies
Inventors:
Gi Y. Kim, Marbert G. Moore, Adrian Jansz, David K. Foote, Richard L. Hendrickson, Ken Doering
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-17 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 1 | View | |
| 2003-10-24 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2003-10-20 | PETDEC |
Petition Decision | 2 | View | |
| 2003-09-26 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2002-10-03 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-10-03 | SPEC |
Specification | 10 | View | |
| 2002-10-03 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2002-10-03 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Gi Y. Kim
Sunnyvale, CA
Marbert G. Moore
Sunnyvale, CA
Adrian Jansz
Sunnyvale, CA
David K. Foote
Sunnyvale, CA
Richard L. Hendrickson
Sunnyvale, CA
Ken Doering
Sunnyvale, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- 2344-749
- Confirmation No.
- 4005
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Quick Facts
- App. No.
- 60/416,084
- Filed
- 2002-10-03
External Links