Patent Application
Provisional
App. No. 60/421,464
· Confirmation No. 3281
Optical switching in a lithography system
Provisional Application Expired
Inventors
Marco Jan-Jaco Wieland
Delft, NETHERLANDS
Johannes Christiaan van 't Spijker
Delft, NETHERLANDS
Remco Jager
Delft, NETHERLANDS
Pieter Kruit
Delft, NETHERLANDS
Attorneys & Agents of Record
Prosecution
- Customer No.
- 8791
- Docket No.
- 3531P011Z
- Confirmation No.
- 3281
Child
Claims priority from a provisional application
→
App. 12/041,634
Filed 2008-03-03
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 12/041,635
Filed 2008-03-03
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 13/284,634
Filed 2011-10-28
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 10/692,632
· US 6,958,804
Filed 2003-10-24
· Patented Case
Child
Claims priority from a provisional application
→
App. 12/611,847
· US 8,525,134
Filed 2009-11-03
· Patented Case
Child
Claims priority from a provisional application
→
App. 11/225,604
· US 7,173,263
Filed 2005-09-12
· Patented Case
Child
Claims priority from a provisional application
→
App. 11/982,119
· US 7,612,866
Filed 2007-11-01
· Patented Case
COURT APPOINTMENT
Recorded 2019-05-07
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Quick Facts
- App. No.
- 60/421,464
- Filed
- 2002-10-25
External Links