IP Library › Patent Application 60444612
Patent Application Provisional Small
App. No. 60/444,612 · Confirmation No. 4517

Helix coupled remote plasma source

Inventor: Mohammad Kamarehi
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2003-01-30 TRNA Transmittal of New Application 3 View
2003-01-30 SPEC Specification 4 View
2003-01-30 CLM Claims 1 View
2003-01-30 DRW Drawings-only black and white line drawings 10 View
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Quick Facts
App. No.
60/444,612
Filed
2003-01-30