IP Library › Patent Application 60445459
Patent Application Provisional
App. No. 60/445,459 · Confirmation No. 8037

Electrostatic clamping of thin wafers in plasma processing vacuum chamber

Provisional Application Expired
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 Code Description Pages PDF
2003-02-07 TRNA Transmittal of New Application 1 View
2003-02-07 SPEC Specification 9 View
2003-02-07 CLM Claims 2 View
2003-02-07 DRW Drawings-only black and white line drawings 4 View
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Quick Facts
App. No.
60/445,459
Filed
2003-02-07