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App. No. 10/760,464 · Confirmation No. 1392

Electrostatic clamping of thin wafers in plasma processing vacuum chamber

Abandoned -- After Examiner's Answer or Board of Appeals Decision View Publication ↗
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2011-08-30 ABN Abandonment 2 View
2011-06-10 APDA Patent Board Decision - Examiner Affirmed 14 View
2009-11-23 AP_DK_M Appeal Docketing Notice 2 View
2009-11-02 M327 Miscellaneous Communication to Applicant - No Action Count 2 View
2009-05-28 APRD Order Returning Undocketed Appeal to the examiner from Patent Board 4 View
2009-05-22 RBNE Reply Brief Noted - Patent Board 2 View
2009-04-03 APRB Reply Brief Filed 3 View
2009-04-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-02-04 APEA Examiner's Answer to Appeal Brief 15 View
2008-11-17 AP.B Appeal Brief Filed 28 View
2008-11-17 WFEE Fee Worksheet (SB06) 2 View
2008-11-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-11-17 XT/ Extension of Time 1 View
2008-07-18 N/AP Notice of Appeal Filed 1 View
2008-07-18 WFEE Fee Worksheet (SB06) 2 View
2008-07-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-07-18 XT/ Extension of Time 1 View
2008-03-18 CTFR Final Rejection 14 View
2008-03-18 892 List of references cited by examiner 1 View
2008-03-18 FWCLM Index of Claims 1 View
2008-03-18 SRFW Search information including classification, databases and other search related notes 1 View
2007-12-11 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-12-11 CLM Claims 2 View
2007-12-11 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2007-12-11 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-12-11 WFEE Fee Worksheet (SB06) 1 View
2007-09-24 CTFR Final Rejection 10 View
2007-09-24 892 List of references cited by examiner 1 View
2007-09-24 FOR Foreign Reference 10 View
2007-09-24 FOR Foreign Reference 9 View
2007-09-24 CLM Claims 2 View
2007-09-24 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2007-09-24 FWCLM Index of Claims 1 View
2007-09-24 SRFW Search information including classification, databases and other search related notes 1 View
2007-09-07 A.NE Response After Final Action 1 View
2007-09-07 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2007-09-07 AF/D Affidavit-submitted prior to Mar 15, 2013 1 View
2007-09-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-09-07 AF/D Affidavit-submitted prior to Mar 15, 2013 37 View
2007-09-07 WFEE Fee Worksheet (SB06) 1 View
2007-07-17 CTFR Final Rejection 7 View
2007-07-17 892 List of references cited by examiner 1 View
2007-07-17 FWCLM Index of Claims 1 View
2007-07-17 SRFW Search information including classification, databases and other search related notes 1 View
2007-04-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2007-04-19 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2007-04-19 CLM Claims 2 View
2007-04-19 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2007-04-19 DRW Drawings-only black and white line drawings 1 View
2007-04-19 WFEE Fee Worksheet (SB06) 1 View
2007-02-16 CTNF Non-Final Rejection 6 View
2007-02-16 1449 List of References cited by applicant and considered by examiner 3 View
2007-02-16 892 List of references cited by examiner 1 View
2007-02-16 FWCLM Index of Claims 1 View
2007-02-16 BIB Bibliographic Data Sheet 1 View
2007-02-16 SRFW Search information including classification, databases and other search related notes 1 View
2007-01-08 SRNT Examiner's search strategy and results 3 View
2005-09-21 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-09-21 136A Authorization for Extension of Time all replies 3 View
2005-09-21 FOR Foreign Reference 14 View
2005-09-21 FOR Foreign Reference 10 View
2005-07-12 C.AD Change of Address 1 View
2005-07-12 LET. Miscellaneous Incoming Letter 1 View
2004-09-29 WFEE Fee Worksheet (SB06) 1 View
2004-06-07 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-06-07 FOR Foreign Reference 18 View
2004-01-21 TRNA Transmittal of New Application 4 View
2004-01-21 SPEC Specification 9 View
2004-01-21 CLM Claims 2 View
2004-01-21 ABST Abstract 1 View
2004-01-21 DRW Drawings-only black and white line drawings 6 View
2004-01-21 OATH Oath or Declaration filed 4 View
2004-01-21 A.PE Preliminary Amendment 1 View
2004-01-21 SPEC Specification 1 View
2004-01-21 CLM Claims 2 View
2004-01-21 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-01-21 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-01-21 WCLM Claims Worksheet (PTO-2022) 1 View
2004-01-21 WFEE Fee Worksheet (SB06) 1 View
2004-01-21 WFEE Fee Worksheet (SB06) 1 View
2004-01-21 FOR Foreign Reference 16 View
2004-01-21 FOR Foreign Reference 10 View
2004-01-21 FOR Foreign Reference 6 View
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Quick Facts
App. No.
10/760,464
Filed
2004-01-21
Pub. No.
US20040154748A1
Art Unit
1724