Patent Assignment
Reel/Frame 014911/0717
Assignment of Assignor's Interest
Recorded: 2004-01-21
Pages: 3
Assignee
TRIKON HOLDINGS LIMITED
COED RHEDYN, RINGLAND WAY, NEWPORT, GWENT, NP18 2TA, UNITED KINGDOM
Covered Property
(1)
Electrostatic clamping of thin wafers in plasma processing vacuum chamber
Application:
10/760,464 →
Publication:
US 2004/0154748
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.