IP Library › Patent Application 60455034
Patent Application Provisional
App. No. 60/455,034 · Confirmation No. 1973

Method and apparatus for cycle time improvements for ALD

Provisional Application Expired
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 Code Description Pages PDF
2003-03-14 TRNA Transmittal of New Application 2 View
2003-03-14 SPEC Specification 11 View
2003-03-14 CLM Claims 1 View
2003-03-14 DRW Drawings-only black and white line drawings 6 View
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Quick Facts
App. No.
60/455,034
Filed
2003-03-14