IP Library › Patent Application 60463598
Patent Application Provisional
App. No. 60/463,598 · Confirmation No. 7613

Method and apparatus for multilayer thickness measurement

Inventors: Doug Sabin, Paul Gurrisi
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2003-04-17 TRNA Transmittal of New Application 3 View
2003-04-17 SPEC Specification 7 View
2003-04-17 LET. Miscellaneous Incoming Letter 8 View
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Quick Facts
App. No.
60/463,598
Filed
2003-04-17