IP Library › Patent Application 60465142
Patent Application Provisional Small
App. No. 60/465,142 · Confirmation No. 7122

Collection of unused precursors in ALD

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2003-04-23 TRNA Transmittal of New Application 3 View
2003-04-23 SPEC Specification 7 View
2003-04-23 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
App. No.
60/465,142
Filed
2003-04-23