IP Library Patent Application 60529343
Patent Application Provisional Small
App. No. 60/529,343 · Confirmation No. 1119

Method and apparatus for extending equipment uptime in ion implantation

Provisional Application Expired
⬇ PDF
Code Description Pages PDF
2003-12-12 SPEC Specification 22 View
2003-12-12 CLM Claims 5 View
2003-12-12 ABST Abstract 1 View
2003-12-12 DRW Drawings-only black and white line drawings 20 View
2003-12-12 WFEE Fee Worksheet (SB06) 1 View
2003-12-12 TRNA Transmittal of New Application 4 View
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Quick Facts
App. No.
60/529,343
Filed
2003-12-12