Patent Application
Provisional
Small
App. No. 60/533,097
· Confirmation No. 7356
Method and apparatus for high selectivity silicon nitride etching
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-12-30 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-12-30 | SPEC |
Specification | 3 | View | |
| 2003-12-30 | CLM |
Claims | 3 | View | |
| 2003-12-30 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2003-12-30 | APPENDIX |
Appendix to the specification | 7 | View | |
| 2003-12-30 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 34132
- Docket No.
- 108430.040
- Confirmation No.
- 7356
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-08-13
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Quick Facts
- App. No.
- 60/533,097
- Filed
- 2003-12-30
External Links