IP Library › Patent Application 60538446
Patent Application Provisional Small
App. No. 60/538,446 · Confirmation No. 9462

Wafer deep charge scavenging using ionizer with aid of ultraviolet and quantitative evaluation of wafer electrostatic charges

Inventor: Yi Xiang Wang
Provisional Application Expired
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 Code Description Pages PDF
2004-01-21 TRNA Transmittal of New Application 1 View
2004-01-21 SPEC Specification 5 View
2004-01-21 ADS Application Data Sheet 3 View
2004-01-21 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/538,446
Filed
2004-01-21