Patent Assignment
Reel/Frame 015225/0702
Assignment of Assignor's Interest
Recorded: 2004-04-19
Pages: 9
Assignor
CHEN, ZHONG WEI
Executed: 2004-04-05
Assignee
HERMES-MICROVISION (TAIWAN) INC.
18 CREATION ROAD 1, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300 R.O.C., TAIWAN
Covered Properties
(7)
Method and System of Using a Scanning Electron Microscope in Semiconductor Wafer Inspection with Z-Stage Focus
Method for in-Line Monitoring of via/Contact Holes Etch Process Based on Test Structures in Semiconductor Wafer Manufacturing
Swinging Objective Retarding Immersion Lens Electron Optics Focusing, Deflection and Signal Collection System and Method
Method and Apparatus for Scanning Semiconductor Wafers Using a Scanning Electron Microscope
Patent:
6,881,956 →
Application:
10/649,599 →
Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing
Application:
60/332,016 →
Method and system for inline process monitoring of etching uniformity across a wafer
Application:
60/518,865 →
Wafer deep charge scavenging using ionizer with aid of ultraviolet and quantitative evaluation of wafer electrostatic charges
Application:
60/538,446 →
Related Assignments
(9)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 21, 2002
From: PAN, CHUNG-SHIH; WANG, YI-XIANG; DESAI, ANIL
To: HERMES-MICORVISION, INC.
Reel/Frame 012725/0183 →
Assignment of Assignor's Interest
Apr 11, 2003
From: ZHAO, YAN; YEH, CHANG-CHUN; CHEN, ZHONGWEI; JAU, JACK
To: HERMES-MICROVISION, INC.
Reel/Frame 013942/0003 →
Assignment of Assignor's Interest
Feb 11, 2004
From: JAU, JACK Y.; CHEN, ZHONGWEI
To: HERMES-MICRVISON, INC.
Reel/Frame 014328/0226 →
Assignment of Assignor's Interest
Apr 14, 2004
From: ZHAO, YAN; YEH, CHANG-CHUN; CHEN, ZHONGWEI; JAU, JACK
To: HERMES-MICROVISION, INC.
Reel/Frame 014520/0672 →
Assignment of Assignor's Interest
Apr 14, 2004
From: JAU, JACK
To: HERMES-MICROVISION, INC.
Reel/Frame 014520/0678 →
Assignment of Assignor's Interest
Apr 14, 2004
From: WANG, YI XIANG
To: HERMES-MICROVISION, INC.
Reel/Frame 014520/0720 →
Corrective Coversheet to Correct the Assignor Previously Recorded on Reel 015225, Frame 0702.
Nov 10, 2004
From: HERMES-MICROVISION, INC.
To: HERMES-MICROVISION (TAIWAN) INC.
Reel/Frame 015381/0028 →
Assignment of Assignor's Interest
Dec 29, 2020
From: HERMES MICROVISION, INC.
To: HERMES MICROVISION INCORPORATED B.V.
Reel/Frame 054866/0742 →
Assignment of Assignor's Interest
Dec 29, 2020
From: HERMES MICROVISION INCORPORATED B.V.
To: ASML NETHERLANDS B.V.
Reel/Frame 054870/0156 →