IP Library › Granted Patent US 6,815,345
Granted Patent Utility
US 6,815,345 · Confirmation No. 1632

METHOD FOR IN-LINE MONITORING OF VIA/CONTACT HOLES ETCH PROCESS BASED ON TEST STRUCTURES IN SEMICONDUCTOR WAFER MANUFACTURING

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2014-08-06 PET.AUTO ePetition Request Form 2 View
2014-08-06 WFEE Fee Worksheet (SB06) 2 View
2014-08-06 PET.DEC.AUTO ePetition Grant Letter 1 View
2014-08-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-04-29 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-04-29 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-04-07 PA.. Power of Attorney 2 View
2014-04-07 R3.73 Assignee showing of ownership per 37 CFR 3.73 3 View
2014-04-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-10-07 BIB Bibliographic Data Sheet 1 View
2004-09-30 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2004-06-17 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-06-17 OATH Oath or Declaration filed 2 View
2004-06-14 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-06-14 LET. Miscellaneous Incoming Letter 1 View
2004-06-14 DRW Drawings-only black and white line drawings 5 View
2004-06-14 PA.. Power of Attorney 5 View
2004-06-02 RUSH Printer Query form, used by the publications branch 1 View
2004-03-11 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2004-03-11 892 List of references cited by examiner 1 View
2004-03-11 FWCLM Index of Claims 1 View
2004-03-11 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-11 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-19 SRNT Examiner's search strategy and results 1 View
2004-02-17 SRNT Examiner's search strategy and results 9 View
2003-04-04 LET. Miscellaneous Incoming Letter 5 View
2003-04-04 OATH Oath or Declaration filed 4 View
2003-04-04 PA.. Power of Attorney 2 View
2003-04-04 ADS Application Data Sheet 4 View
2003-04-04 XT/ Extension of Time 1 View
2003-01-07 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2002-11-21 TRNA Transmittal of New Application 2 View
2002-11-21 SPEC Specification 9 View
2002-11-21 CLM Claims 1 View
2002-11-21 ABST Abstract 1 View
2002-11-21 DRW Drawings-only black and white line drawings 5 View
2002-11-21 OATH Oath or Declaration filed 3 View
2002-11-21 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-11-21 SRFW Search information including classification, databases and other search related notes 1 View
2002-11-21 FWCLM Index of Claims 1 View
2002-11-21 TRNA Transmittal of New Application 2 View
2002-11-21 DRW Drawings-only black and white line drawings 5 View
2002-11-21 CLM Claims 9 View
2002-11-21 CLM Claims 1 View
2002-11-21 ABST Abstract 1 View
2002-11-21 OATH Oath or Declaration filed 3 View
2002-11-21 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,815,345
App. No.
10/302,809
Filed
2002-11-21
Granted
2004-11-09
Pub. No.
US20030136762A1
Examiner
DANG, PHUC T
Art Unit
2818
PTA
-132 days