IP Library › Granted Patent US 6,791,095
Granted Patent Utility
US 6,791,095 · Confirmation No. 2272

METHOD AND SYSTEM OF USING A SCANNING ELECTRON MICROSCOPE IN SEMICONDUCTOR WAFER INSPECTION WITH Z-STAGE FOCUS

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2016-03-14 IMIS Miscellaneous Internal Document 2 View
2015-05-05 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2015-05-05 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2015-04-23 PA.. Power of Attorney 2 View
2015-04-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-04-23 R3.73 Assignee showing of ownership per 37 CFR 3.73 3 View
2015-04-22 PEFN Pre-Exam Formalities Notice 1 View
2015-04-21 N572 Response - Re: Informal Power of Attorney (PTOL-308) 2 View
2015-04-16 PA.. Power of Attorney 2 View
2015-04-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-04-16 R3.73 Assignee showing of ownership per 37 CFR 3.73 3 View
2004-07-26 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-07-26 LET. Miscellaneous Incoming Letter 2 View
2004-07-26 DRW Drawings-only black and white line drawings 6 View
2004-04-23 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-23 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-23 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2004-04-23 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-23 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-23 892 List of references cited by examiner 1 View
2004-04-23 FWCLM Index of Claims 1 View
2004-04-12 SRNT Examiner's search strategy and results 2 View
2004-03-26 FWCLM Index of Claims 1 View
2004-03-26 WFEE Fee Worksheet (SB06) 1 View
2004-03-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-03-15 CLM Claims 11 View
2004-03-15 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-03-15 XT/ Extension of Time 2 View
2004-03-15 LET. Miscellaneous Incoming Letter 1 View
2003-10-24 CTNF Non-Final Rejection 10 View
2003-10-24 892 List of references cited by examiner 1 View
2003-10-24 FWCLM Index of Claims 1 View
2003-10-24 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-03 SRNT Examiner's search strategy and results 3 View
2003-08-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-08-18 SPEC Specification 2 View
2003-08-18 CLM Claims 7 View
2003-08-18 DRW Drawings-only black and white line drawings 1 View
2003-08-18 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-08-18 XT/ Extension of Time 1 View
2003-08-18 LET. Miscellaneous Incoming Letter 2 View
2003-04-16 CTNF Non-Final Rejection 8 View
2003-04-15 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2003-03-17 LET. Miscellaneous Incoming Letter 2 View
2003-03-17 PA.. Power of Attorney 9 View
2003-02-27 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-10-24 CTNF Non-Final Rejection 9 View
2002-10-24 892 List of references cited by examiner 1 View
2002-10-24 1449 List of References cited by applicant and considered by examiner 1 View
2002-10-17 SRNT Examiner's search strategy and results 2 View
2002-07-02 LET. Miscellaneous Incoming Letter 3 View
2002-07-02 DRW Drawings-only black and white line drawings 6 View
2002-07-02 TRNA Transmittal of New Application 2 View
2002-07-02 DRW Drawings-only black and white line drawings 6 View
2002-04-25 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-03-21 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-03-21 SRFW Search information including classification, databases and other search related notes 1 View
2002-03-21 FWCLM Index of Claims 1 View
2002-03-21 TRNA Transmittal of New Application 2 View
2002-03-21 DRW Drawings-only black and white line drawings 6 View
2002-03-21 SPEC Specification 13 View
2002-03-21 CLM Claims 5 View
2002-03-21 ABST Abstract 1 View
2002-03-21 OATH Oath or Declaration filed 2 View
2002-03-21 WFEE Fee Worksheet (SB06) 1 View
2002-03-21 WFEE Fee Worksheet (SB06) 1 View
2002-03-21 WCLM Claims Worksheet (PTO-2022) 1 View
2002-03-21 TRNA Transmittal of New Application 2 View
2002-03-21 SPEC Specification 13 View
2002-03-21 CLM Claims 5 View
2002-03-21 ABST Abstract 1 View
2002-03-21 DRW Drawings-only black and white line drawings 6 View
2002-03-21 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,791,095
App. No.
10/104,887
Filed
2002-03-21
Granted
2004-09-14
Pub. No.
US20030178576A1
Art Unit
2881
PTA
-260 days