Patent Application
Provisional
Small
App. No. 60/518,865
· Confirmation No. 3334
Method and system for inline process monitoring of etching uniformity across a wafer
Inventor:
Jack Jau
Provisional Application Expired
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-10 | TRNA |
Transmittal of New Application | 1 | View | |
| 2003-11-10 | SPEC |
Specification | 8 | View | |
| 2003-11-10 | ADS |
Application Data Sheet | 3 | View | |
| 2003-11-10 | ARTIFACT |
Artifact sheet indicating an item has been filed which cannot be scanned | 1 | View | |
| 2003-11-10 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Jack Jau
Los Altos, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20350
- Docket No.
- 021773-001600US
- Confirmation No.
- 3334
CORRECTIVE COVERSHEET TO CORRECT THE ASSIGNOR PREVIOUSLY RECORDED ON REEL 015225, FRAME 0702.
Recorded 2004-11-10
from
CHEN, ZHONG WEI
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-04-19
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 60/518,865
- Filed
- 2003-11-10
External Links