IP Library › Patent Application 60572287
Patent Application Provisional Small
App. No. 60/572,287 · Confirmation No. 4871

Charged particle beam exposure system

Inventor: Pieter Kruit
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2004-05-17 TRNA Transmittal of New Application 3 View
2004-05-17 SPEC Specification 10 View
2004-05-17 CLM Claims 4 View
2004-05-17 ABST Abstract 1 View
2004-05-17 DRW Drawings-only black and white line drawings 2 View
2004-05-17 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/572,287
Filed
2004-05-17