Patent Application
Provisional
App. No. 60/603,984
· Confirmation No. 6392
Batch semiconductor processing components and semiconductor processing utilizing same
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-08-24 | TRNA |
Transmittal of New Application | 2 | View | |
| 2004-08-24 | SPEC |
Specification | 10 | View | |
| 2004-08-24 | CLM |
Claims | 6 | View | |
| 2004-08-24 | ABST |
Abstract | 1 | View | |
| 2004-08-24 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2004-08-24 | ADS |
Application Data Sheet | 2 | View | |
| 2004-08-24 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Yeshwanth Narendar
Westford, MA
Matthew A. Simpson
Sudbury, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 34456
- Docket No.
- 1075-E4375-PROV
- Confirmation No.
- 6392
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-05-09
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-12-10
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Quick Facts
- App. No.
- 60/603,984
- Filed
- 2004-08-24
External Links