IP Library › Patent Application 60624727
Patent Application Provisional Small
App. No. 60/624,727 · Confirmation No. 5303

Capillary drying of substrates for single-substrate processing

Inventor: Alan Walter
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2004-11-03 TRNA Transmittal of New Application 1 View
2004-11-03 SPEC Specification 9 View
2004-11-03 CLM Claims 3 View
2004-11-03 ABST Abstract 1 View
2004-11-03 DRW Drawings-only black and white line drawings 6 View
2004-11-03 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/624,727
Filed
2004-11-03