IP Library Patent Application 11266402
Patent Application Utility Small
App. No. 11/266,402 · Confirmation No. 8706

APPARATUS AND METHOD FOR REMOVING TRACE AMOUNTS OF LIQUID FROM SUBSTRATES DURING SINGLE-SUBSTRATE PROCESSING

Inventor: Alan Walter
Abandoned -- Failure to Pay Issue Fee View Publication ↗
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2008-07-31 ABN Abandonment 1 View
2008-05-22 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2008-04-01 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2008-03-03 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2008-03-03 892 List of references cited by examiner 1 View
2008-03-03 1449 List of References cited by applicant and considered by examiner 1 View
2008-03-03 SRFW Search information including classification, databases and other search related notes 1 View
2008-03-03 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2008-03-03 SRNT Examiner's search strategy and results 4 View
2008-03-03 BIB Bibliographic Data Sheet 1 View
2008-01-23 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2008-01-23 RCEX Request for Continued Examination (RCE) 2 View
2008-01-23 WFEE Fee Worksheet (SB06) 2 View
2008-01-23 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-01-23 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2008-01-23 CLM Claims 4 View
2008-01-23 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2008-01-23 WFEE Fee Worksheet (SB06) 1 View
2007-12-28 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2007-10-23 CTFR Final Rejection 9 View
2007-10-22 SRNT Examiner's search strategy and results 1 View
2007-09-17 WFEE Fee Worksheet (SB06) 2 View
2007-09-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-09-17 WFEE Fee Worksheet (SB06) 1 View
2007-09-17 FWCLM Index of Claims 1 View
2007-09-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-09-17 CLM Claims 4 View
2007-09-17 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2007-09-17 XT/ Extension of Time 1 View
2007-05-03 NTC.PUB Notice of Publication 1 View
2007-04-16 CTNF Non-Final Rejection 9 View
2007-04-16 1449 List of References cited by applicant and considered by examiner 1 View
2007-04-16 892 List of references cited by examiner 1 View
2007-04-16 SRFW Search information including classification, databases and other search related notes 1 View
2007-02-27 SRNT Examiner's search strategy and results 2 View
2006-10-25 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2005-11-29 A.PE Preliminary Amendment 3 View
2005-11-29 SPEC Specification 1 View
2005-11-29 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2005-11-03 TRNA Transmittal of New Application 3 View
2005-11-03 SPEC Specification 11 View
2005-11-03 CLM Claims 3 View
2005-11-03 ABST Abstract 1 View
2005-11-03 DRW Drawings-only black and white line drawings 6 View
2005-11-03 OATH Oath or Declaration filed 3 View
2005-11-03 WFEE Fee Worksheet (SB06) 1 View
2005-11-03 WFEE Fee Worksheet (SB06) 1 View
2005-11-03 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
11/266,402
Filed
2005-11-03
Pub. No.
US20070094885A1
Art Unit
3749