Composition and associated method for catalyzing removal rates of dielectric films during chemical mechanical planarization

Provisional Application Expired

	Code	Description	Pages	PDF
2005-01-07	`TRNA`	Transmittal of New Application	2	View
2005-01-07	`SPEC`	Specification	16	View
2005-01-07	`CLM`	Claims	3	View
2005-01-07	`ABST`	Abstract	1	View
2005-01-07	`DRW`	Drawings-only black and white line drawings	2	View
2005-01-07	`WFEE`	Fee Worksheet (SB06)	1	View

Inventors

Junaid Ahmed Siddiqui Richmond, VA

Daniel Hernandez Castillo II Laveen, AZ

Robin Edward Richards Phoenix, AZ

Timothy Frederick Compton Casa Grande, AZ

Attorneys & Agents of Record

GEOFFERY CHASE Reg. 28059 Attorney

AMY CARR-TREXLER Reg. 51531 Attorney · AIR PRODUCTS AND CHEMICALS, INC.

ROBERT DIAZ Reg. 55109 Attorney · AIR PRODUCTS AND CHEMICALS, INC.

MATTHEW WEAVER Reg. 64128 Attorney · AIR PRODUCTS AND CHEMICALS, INC.

DALESIA BOYD Reg. 65561 Attorney · EDMONDS & CMAIDALKA

JASON PLOEGER Reg. 76863 Agent · AIR PRODUCTS AND CHEMICALS, INC.

Prosecution

No recorded assignments were found for this patent.

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