IP Library › Patent Application 60652422
Patent Application Provisional Small
App. No. 60/652,422 · Confirmation No. 1894

Vaporizer for atomic layer deposition system

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2005-02-10 TRNA Transmittal of New Application 2 View
2005-02-10 SPEC Specification 7 View
2005-02-10 DRW Drawings-only black and white line drawings 17 View
2005-02-10 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/652,422
Filed
2005-02-10