IP Library › Patent Application 60662644
Patent Application Provisional Small
App. No. 60/662,644 · Confirmation No. 7706

Microelectromechanical system (MEMS) component integrated in a hermetically sealed package

Inventor: Lior Shiv
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2005-03-17 TRNA Transmittal of New Application 1 View
2005-03-17 SPEC Specification 10 View
2005-03-17 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/662,644
Filed
2005-03-17