IP Library › Patent Application 60702561
Patent Application Provisional Small
App. No. 60/702,561 · Confirmation No. 2221

Reliability in a maskless lithography system

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2005-10-24 PEFR Applicant Response to Pre-Exam Formalities Notice 6 View
2005-08-23 PEFN Pre-Exam Formalities Notice 2 View
2005-07-25 TRNA Transmittal of New Application 3 View
2005-07-25 SPEC Specification 18 View
2005-07-25 CLM Claims 7 View
2005-07-25 ABST Abstract 1 View
2005-07-25 DRW Drawings-only black and white line drawings 7 View
2005-07-25 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/702,561
Filed
2005-07-25