Patent Application
Provisional
App. No. 60/718,143
· Confirmation No. 9243
Lithography system, sensor and measuring method
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-12-20 | WFEE |
Fee Worksheet (SB06) | 5 | View | |
| 2005-09-15 | TRNA |
Transmittal of New Application | 4 | View | |
| 2005-09-15 | SPEC |
Specification | 18 | View | |
| 2005-09-15 | CLM |
Claims | 5 | View | |
| 2005-09-15 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2005-09-15 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Pieter Kruit
EB Delft, NETHERLANDS
Erwin Slot
AN Zoetermeer, NETHERLANDS
Tijs Frans Teepen
RB Tilburg, NETHERLANDS
Marco Jan Jaco Wieland
GD Delft, NETHERLANDS
Stijn Willem Steenbrink
AM Utrecht, NETHERLANDS
Attorneys & Agents of Record
Prosecution
- Customer No.
- 8791
- Docket No.
- 3531P023Z
- Confirmation No.
- 9243
Child
Claims priority from a provisional application
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App. 13/738,947
· US RE45,206
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· Patented Case
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Claims priority from a provisional application
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App. 16/896,953
· US RE49,602
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· Patented Case
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Claims priority from a provisional application
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App. 14/469,544
· US RE48,046
Filed 2014-08-26
· Patented Case
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Claims priority from a provisional application
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App. 11/521,705
· US 7,868,300
Filed 2006-09-14
· Patented Case
COURT APPOINTMENT
Recorded 2019-05-07
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Quick Facts
- App. No.
- 60/718,143
- Filed
- 2005-09-15
External Links