Patent Application
Provisional
App. No. 60/725,763
· Confirmation No. 8951
Capacitively coupled plasma reactor having a cooled/heated wafer support with uniform temperature distribution
Provisional Application Expired
Inventors
Daniel J. Hoffman
Saratoga, CA
Paul Lukas Brillhart
Pleasanton, CA
Richard Fovell
San Jose, CA
Hamid Frank Tavassoli
Cupertino, CA
Douglas A. Buchberger JR.
Livermore, CA
Douglas H. Burns
Saratoga, CA
Kallol Bera
San Jose, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- 010274 L
- Confirmation No.
- 8951
Child
Claims priority from a provisional application
→
App. 11/410,782
· US 8,034,180
Filed 2006-04-24
· Patented Case
Child
Claims priority from a provisional application
→
App. 11/408,333
· US 8,157,951
Filed 2006-04-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 12/855,678
· US 8,337,660
Filed 2010-08-12
· Patented Case
Child
Claims priority from a provisional application
→
App. 11/409,292
· US 8,092,638
Filed 2006-04-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 12/855,675
Filed 2010-08-12
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 11/410,859
· US 7,988,872
Filed 2006-04-24
· Patented Case
Child
Claims priority from a provisional application
→
App. 12/855,680
· US 8,801,893
Filed 2010-08-12
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/725,763
- Filed
- 2005-10-11
External Links