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App. No. 12/855,675 · Confirmation No. 1433

CAPACITIVLEY COUPLED PLASMA REACTOR HAVING A COOLED/HEATED WAFER SUPPORT WITH UNIFORM TEMPERATURE DISTRIBUTION

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2015-10-09 ABN Abandonment 2 View
2015-03-16 CTFR Final Rejection 24 View
2015-03-10 OATH Oath or Declaration filed 47 View
2015-02-27 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2015-02-27 OA.APPENDIX Office Action Appendix 2 View
2015-02-27 WFEE Fee Worksheet (SB06) 1 View
2015-02-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2015-02-24 CLM Claims 5 View
2015-02-24 INTRVIEW.APP Applicant summary of interview with examiner 1 View
2015-02-24 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2015-02-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-12-19 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2014-12-19 OA.APPENDIX Office Action Appendix 2 View
2014-12-12 M865 Letter Requesting Interview with Examiner 3 View
2014-12-12 TRAN.LET Transmittal Letter 1 View
2014-11-24 CTNF Non-Final Rejection 22 View
2014-11-24 SRFW Search information including classification, databases and other search related notes 1 View
2014-11-24 SRNT Examiner's search strategy and results 1 View
2014-08-01 RCEX Request for Continued Examination (RCE) 3 View
2014-08-01 INTRVIEW.APP Applicant summary of interview with examiner 3 View
2014-08-01 WFEE Fee Worksheet (SB06) 2 View
2014-08-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-08-01 WFEE Fee Worksheet (SB06) 1 View
2014-07-08 CTAV Advisory Action (PTOL-303) 4 View
2014-07-08 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 2 View
2014-07-08 892 List of references cited by examiner 1 View
2014-07-08 OA.APPENDIX Office Action Appendix 1 View
2014-06-26 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2014-06-26 OA.APPENDIX Office Action Appendix 1 View
2014-06-26 A.NE Response After Final Action 1 View
2014-06-26 CLM Claims 5 View
2014-06-26 INTRVIEW.APP Applicant summary of interview with examiner 1 View
2014-06-26 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2014-06-26 A.NE.AFCP After Final Consideration Program Request 2 View
2014-06-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-06-26 WFEE Fee Worksheet (SB06) 1 View
2014-04-04 CTFR Final Rejection 23 View
2014-03-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2014-03-24 CLM Claims 5 View
2014-03-24 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2014-03-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-03-24 WFEE Fee Worksheet (SB06) 1 View
2013-12-24 CTNF Non-Final Rejection 22 View
2013-12-11 CTAV Advisory Action (PTOL-303) 5 View
2013-12-11 INTV.SUM.EX Examiner initiated interview summary (PTOL-413B) 1 View
2013-12-11 OA.APPENDIX Office Action Appendix 1 View
2013-12-03 A.NE.AFCP After Final Consideration Program Request 2 View
2013-12-03 A.NE Response After Final Action 1 View
2013-12-03 CLM Claims 5 View
2013-12-03 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2013-12-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-12-03 WFEE Fee Worksheet (SB06) 1 View
2013-09-06 CTFR Final Rejection 23 View
2013-09-06 892 List of references cited by examiner 1 View
2013-09-06 1449 List of References cited by applicant and considered by examiner 2 View
2013-09-06 SRFW Search information including classification, databases and other search related notes 1 View
2013-09-06 SRNT Examiner's search strategy and results 2 View
2013-08-20 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2013-08-20 OA.APPENDIX Office Action Appendix 2 View
2013-08-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2013-08-13 CLM Claims 5 View
2013-08-13 INTRVIEW.APP Applicant summary of interview with examiner 1 View
2013-08-13 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2013-08-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-08-13 WFEE Fee Worksheet (SB06) 1 View
2013-06-19 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2013-06-19 WFEE Fee Worksheet (SB06) 2 View
2013-06-19 N417 Electronic Filing System Acknowledgment Receipt 3 View
2013-06-19 TRAN.LET Transmittal Letter 1 View
2013-05-16 CTNF Non-Final Rejection 21 View
2013-05-16 892 List of references cited by examiner 1 View
2013-05-16 1449 List of References cited by applicant and considered by examiner 1 View
2013-05-16 SRNT Examiner's search strategy and results 2 View
2013-05-16 SRFW Search information including classification, databases and other search related notes 1 View
2012-10-10 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2012-10-10 WFEE Fee Worksheet (SB06) 2 View
2012-10-10 N417 Electronic Filing System Acknowledgment Receipt 3 View
2012-10-10 RCEX Request for Continued Examination (RCE) 3 View
2012-10-10 TRAN.LET Transmittal Letter 1 View
2012-10-10 WFEE Fee Worksheet (SB06) 1 View
2012-09-25 CTAV Advisory Action (PTOL-303) 3 View
2012-09-25 OA.APPENDIX Office Action Appendix 1 View
2012-09-10 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2012-09-10 SPEC Specification 1 View
2012-09-10 CLM Claims 5 View
2012-09-10 INTRVIEW.APP Applicant summary of interview with examiner 1 View
2012-09-10 REM Applicant Arguments/Remarks Made in an Amendment 9 View
2012-09-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-09-10 AF/D Affidavit-submitted prior to Mar 15, 2013 7 View
2012-09-10 LET. Miscellaneous Incoming Letter 2 View
2012-09-10 WFEE Fee Worksheet (SB06) 1 View
2012-08-23 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2012-08-23 OA.APPENDIX Office Action Appendix 2 View
2012-07-11 CTFR Final Rejection 24 View
2012-07-11 1449 List of References cited by applicant and considered by examiner 1 View
2012-06-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2012-06-14 CLM Claims 5 View
2012-06-14 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2012-06-14 TRAN.LET Transmittal Letter 1 View
2012-06-14 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2012-06-14 WFEE Fee Worksheet (SB06) 2 View
2012-06-14 N417 Electronic Filing System Acknowledgment Receipt 3 View
2012-06-14 WFEE Fee Worksheet (SB06) 1 View
2012-04-30 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2012-04-20 PA.. Power of Attorney 1 View
2012-04-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-04-20 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2012-03-14 CTNF Non-Final Rejection 20 View
2012-03-14 892 List of references cited by examiner 1 View
2012-03-14 1449 List of References cited by applicant and considered by examiner 1 View
2012-03-14 1449 List of References cited by applicant and considered by examiner 1 View
2012-03-14 SRFW Search information including classification, databases and other search related notes 1 View
2012-03-14 1449 List of References cited by applicant and considered by examiner 1 View
2012-03-14 SRNT Examiner's search strategy and results 1 View
2012-02-09 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2012-02-09 FOR Foreign Reference 6 View
2012-02-09 N417 Electronic Filing System Acknowledgment Receipt 3 View
2012-02-09 TRAN.LET Transmittal Letter 1 View
2011-12-21 RCEX Request for Continued Examination (RCE) 2 View
2011-12-21 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2011-12-21 CLM Claims 5 View
2011-12-21 INTRVIEW.APP Applicant summary of interview with examiner 1 View
2011-12-21 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2011-12-21 TRAN.LET Transmittal Letter 1 View
2011-12-21 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2011-12-21 FOR Foreign Reference 6 View
2011-12-21 WFEE Fee Worksheet (SB06) 2 View
2011-12-21 N417 Electronic Filing System Acknowledgment Receipt 3 View
2011-12-21 WFEE Fee Worksheet (SB06) 1 View
2011-12-12 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2011-09-27 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2011-09-27 WFEE Fee Worksheet (SB06) 2 View
2011-09-27 N417 Electronic Filing System Acknowledgment Receipt 3 View
2011-09-27 TRAN.LET Transmittal Letter 2 View
2011-09-26 CTFR Final Rejection 21 View
2011-09-26 892 List of references cited by examiner 1 View
2011-09-26 SRFW Search information including classification, databases and other search related notes 1 View
2011-09-26 1449 List of References cited by applicant and considered by examiner 1 View
2011-09-26 OA.APPENDIX Office Action Appendix 1 View
2011-09-26 SRNT Examiner's search strategy and results 1 View
2011-09-26 BIB Bibliographic Data Sheet 1 View
2011-09-12 ADS Application Data Sheet 8 View
2011-09-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-08-31 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-08-31 CLM Claims 5 View
2011-08-31 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2011-08-31 WFEE Fee Worksheet (SB06) 2 View
2011-08-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-08-31 WFEE Fee Worksheet (SB06) 1 View
2011-07-06 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2011-07-06 WFEE Fee Worksheet (SB06) 2 View
2011-07-06 N417 Electronic Filing System Acknowledgment Receipt 3 View
2011-07-06 TRAN.LET Transmittal Letter 1 View
2011-06-01 CTNF Non-Final Rejection 21 View
2011-06-01 892 List of references cited by examiner 1 View
2011-06-01 SRFW Search information including classification, databases and other search related notes 1 View
2011-06-01 BIB Bibliographic Data Sheet 1 View
2011-06-01 SRNT Examiner's search strategy and results 13 View
2011-06-01 1449 List of References cited by applicant and considered by examiner 8 View
2011-06-01 1449 List of References cited by applicant and considered by examiner 1 View
2011-04-22 IDS Information Disclosure Statement (IDS) Form (SB08) 8 View
2011-04-22 TRAN.LET Transmittal Letter 1 View
2011-04-22 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2011-04-22 N417 Electronic Filing System Acknowledgment Receipt 3 View
2011-04-22 TRAN.LET Transmittal Letter 1 View
2011-01-10 R48.REQ Request under Rule 48 correcting inventorship 20 View
2011-01-10 WFEE Fee Worksheet (SB06) 2 View
2011-01-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-12-23 NTC.PUB Notice of Publication 1 View
2010-11-15 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-11-15 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-11-03 PA.. Power of Attorney 1 View
2010-11-03 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2010-11-03 136A Authorization for Extension of Time all replies 2 View
2010-09-15 APP.FILE.REC Filing Receipt 3 View
2010-09-08 WFEE Fee Worksheet (SB06) 1 View
2010-08-12 TRNA Transmittal of New Application 1 View
2010-08-12 LET. Miscellaneous Incoming Letter 1 View
2010-08-12 DRW.NONBW Drawings-other than black and white line drawings 11 View
2010-08-12 OATH Oath or Declaration filed 4 View
2010-08-12 N417 Electronic Filing System Acknowledgment Receipt 3 View
2010-08-12 LET. Miscellaneous Incoming Letter 1 View
2010-08-12 SPEC Specification 39 View
2010-08-12 CLM Claims 7 View
2010-08-12 ABST Abstract 1 View
2010-08-12 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2010-08-12 WFEE Fee Worksheet (SB06) 1 View
0001-01-03 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
12/855,675
Filed
2010-08-12
Pub. No.
US20100319852A1
Art Unit
1716