Patent Assignment
Reel/Frame 027900/0462
Assignment of Assignor's Interest
Recorded: 2012-03-21
Pages: 5
Assignor
ADVANCED THERMAL SCIENCES CORPORATION
Executed: 2012-03-16
Assignee
BE AEROSPACE, INC.
1400 CORPORATE CENTER WAY, WELLINGTON, FLORIDA, 33414
Covered Properties
(5)
Plasma Reactor with a Multiple Zone Thermal Control Feed Forward Control Apparatus
Plasma Reactor with Feed Forward Thermal Control System Using a Thermal Model for Accommodating Rf Power Changes or Wafer Temperature Changes
Capacitivley Coupled Plasma Reactor Having a Cooled/Heated Wafer Support with Uniform Temperature Distribution
Application:
12/855,675 →
Publication:
US 2010/0319852
Capacitively Coupled Plasma Reactor Having Very Agile Wafer Temperature Control
Method of Cooling a Wafer Support at a Uniform Temperature in a Capacitively Coupled Plasma Reactor
Related Assignments
(10)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 13, 2010
From: APPLIED MATERIALS, INC.
To: ADVANCED THERMAL SCIENCES CORPORATION
Reel/Frame 024834/0756 →
Corrective Assignment to Correct the Assignee Name Previously Recorded on Reel 024834 Frame 0756. Assignor(S) Hereby Confirms the Advanced Thermal Sciences Corporation.
Aug 17, 2010
From: APPLIED MATERIALS, INC.
To: ADVANCED THERMAL SCIENCES CORPORATION
Reel/Frame 024849/0604 →
Security Agreement
Dec 16, 2010
From: BE AEROSPACE, INC.
To: JPMORGAN CHASE BANK. N.A.
Reel/Frame 025504/0305 →
Assignment of Assignor's Interest
Sep 28, 2011
From: COWANS, KENNETH W.; COWANS, WILLIAM W.; ZUBILLAGA, GLENN W.; MILLAN, ISAAC
To: ADVANCED THERMAL SCIENCES CORPORATION
Reel/Frame 026981/0304 →
Assignment of Assignor's Interest
Oct 18, 2011
From: COWANS, KENNETH W.; COWANS, WILLIAM W.; ZUBILLAGA, GLENN W.; MILLAN, ISAAC
To: ADVANCED THERMAL SCIENCES CORPORATION
Reel/Frame 027076/0796 →
Assignment of Assignor's Interest
May 7, 2012
From: COWANS, KENNETH; COWANS, WILLIAM; ZUBILLAGA, GLENN; MILLAN, ISSAC
To: ADVANCED THERMAL SCIENCES CORPORATION
Reel/Frame 028166/0011 →
Security Interest
Mar 10, 2015
From: B/E AEROSPACE, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 035176/0493 →
Release of Security Interest
Jan 25, 2019
From: JP MORGAN CHASE BANK, N.A
To: B/E AEROSPACE, INC.
Reel/Frame 049209/0619 →
Assignment of Assignor's Interest
Sep 14, 2022
From: B/E AEROSPACE, INC.
To: ADVANCED THERMAL SCIENCES CORPORATION
Reel/Frame 061086/0083 →
Assignment of Assignor's Interest
May 19, 2023
From: B/E AEROSPACE, INC.
To: ADVANCED THERMAL SCIENCES CORPORATION
Reel/Frame 063708/0773 →