IP Library › Patent Application 60837326
Patent Application Provisional
App. No. 60/837,326 · Confirmation No. 9064

Method for creating optimal test patterns for optical model calibration and for selecting suitable calibration test patterns from arbitrary layout

Inventor: Edita Tejnil
Provisional Application Expired
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 Code Description Pages PDF
2006-08-14 TRNA Transmittal of New Application 1 View
2006-08-14 SPEC Specification 26 View
2006-08-14 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/837,326
Filed
2006-08-14