Patent Application
Provisional
App. No. 60/856,994
· Confirmation No. 4534
Ion implantation device and a method of semiconductor manufacturing by the implantation of molecular ions containing phosphorus and arsenic
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2006-11-22 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2006-11-06 | TRNA |
Transmittal of New Application | 2 | View | |
| 2006-11-06 | SPEC |
Specification | 23 | View | |
| 2006-11-06 | CLM |
Claims | 2 | View | |
| 2006-11-06 | ABST |
Abstract | 1 | View | |
| 2006-11-06 | DRW |
Drawings-only black and white line drawings | 18 | View | |
| 2006-11-06 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Dennis Manning
Miami, OK
Erin Dyker
Halifax, CANADA
Thomas N. Horsky
Boxborough, MA
Brian Bernstein
Lexington, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 27160
- Confirmation No.
- 4534
Child
Claims priority from a provisional application
→
App. 11/934,873
· US 8,586,459
Filed 2007-11-05
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 14/074,751
Filed 2013-11-08
· Abandoned -- Incomplete Application (Pre-examination)
Child
PCT
Claims priority from a provisional application
→
PCT/US2007/083576
Filed 2007-11-05
· RO PROCESSING COMPLETED-PLACED IN STORAGE
RELEASE OF SECURITY INTEREST
Recorded 2008-08-13
from
SEMEQUIP, INC.
SECURITY AGREEMENT
Recorded 2008-07-28
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Quick Facts
- App. No.
- 60/856,994
- Filed
- 2006-11-06
External Links