IP Library › Patent Application 60890375
Patent Application Provisional Small
App. No. 60/890,375 · Confirmation No. 7429

METHOD FOR POST-CMP ADVANCED FRONT END OF LINE CLEANING

Inventor: Ismail Kashkoush
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2007-03-13 APP.FILE.REC Filing Receipt 3 View
2007-02-16 TRNA Transmittal of New Application 2 View
2007-02-16 SPEC Specification 10 View
2007-02-16 CLM Claims 5 View
2007-02-16 DRW Drawings-only black and white line drawings 9 View
2007-02-16 WFEE Fee Worksheet (SB06) 2 View
2007-02-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
60/890,375
Filed
2007-02-16