Granted Patent B2

US 8,741,066 · App. 12/070,620 · Granted Jun 3, 2014

Abstract

Claims (32)

1. A method of processing a substrate comprising:

a) providing at least one substrate;

b)performing a chemical mechanical polish to the substrate;

c) etching a surface of the substrate by applying an aqueous etching solution comprising hydroflouric acid and hydrochloric acid;

d) passivating the etched surface of the substrate by applying ozone subsequent to step c) and prior to step e); and

e) cleaning the passivated surface of the substrate by applying an aqueous solution comprising ammonium hydroxide and hydrogen peroxide.

2. The method of claim 1 further comprising:

f) etching the cleaned surface of the substrate;

g) passivating the etched surface of the substrate b applying ozone; and

h) drying the passivated surface of the substrate.

3. The method of claim 2 further comprising:

rinsing the etched surface of the substrate subsequent to step c) but prior to step e);

rinsing the cleaned surface of the substrate subsequent to step e) but prior to step f) while applying megasonic energy; and

rinsing the etched surface of the substrate subsequent to step e) but prior to step h).

4. The method of claim 1 wherein the aqueous solution applied in step e) is standard-clean 1 (SC1) having a ratio of ammonium hydroxide to hydrogen peroxide to water of about 1:2:30.

5. The method of claim 1 wherein step e) comprises applying megasonic energy during the application of the aqueous solution.

6. The method of claim 1 wherein step d) is accomplished by applying ozone gas to the surface of the substrate or applying an ozonated liquid to the surface of the substrate.

7. The method of claim 1 wherein the aqueous solution comprising hydroflouric acid and hydrochloric acid has a ratio of hydroflouric acid to hydrochloric acid to water of about 1:2:200.

8. The method of claim 1 wherein step c) is performed for 4-6 minutes, step d) is performed for 7-9 minutes, and step e) is performed for 9-11 minutes.

9. The method of claim 1 wherein step d) is accomplished by applying an ozonated deionized water to the surface of the substrate at an ambient temperature, and wherein the etching solution of step c) is applied at a temperature of 22-26 degrees Celsius, and wherein the aqueous solution of step e) is applied at a temperature of 60-70 degrees Celsius.

10. The method of claim 1 wherein steps c) through e) are carried out as a batch immersion process or as a single-substrate non-immersion process.

11. A post-CMP semiconductor wafer cleaning method comprising:

a) performing a chemical mechanical polish to at least one surface of at least one semiconductor wafer;

b) etching the surface of the wafer by applying an etching solution comprising hydroflouric acid and hydrochloric acid;

c) rinsing the etched surface of the wafer;

d) passivating the rinsed surface of the wafer by applying ozonated deionized water, wherein step d) is performed subsequent to step c) and prior to step e);

e) cleaning the passivated surface of the wafer by applying: a standard-clean 1 solution while applying megasonic energy;

f) rinsing the cleaned surface of the wafer while applying megasonic energy;

g) etching the rinsed surface of the wafer by applying an etching solution;

h) passivating the rinsed surface of the wafer by applying ozonated deionized water; and

i) drying the rinsed surface of the wafer;

wherein step b) is performed subsequent to step a).

Assignments (15)