Patent Application
Provisional
Small
App. No. 60/959,531
· Confirmation No. 2314
Lithography system, method of clamping and wafer table
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2007-07-31 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2007-07-13 | TRNA |
Transmittal of New Application | 2 | View | |
| 2007-07-13 | SPEC |
Specification | 12 | View | |
| 2007-07-13 | CLM |
Claims | 3 | View | |
| 2007-07-13 | ABST |
Abstract | 1 | View | |
| 2007-07-13 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2007-07-13 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Guido De Boer
GP Someren, NETHERLANDS
Michel Pieter Dansberg
HP Berkel en Rodenrijs, NETHERLANDS
Pieter Kruit
EB Delft, NETHERLANDS
Attorneys & Agents of Record
Prosecution
- Customer No.
- 8791
- Docket No.
- 3531P029Z
- Confirmation No.
- 2314
Child
Claims priority from a provisional application
→
App. 14/135,378
· US 9,645,511
Filed 2013-12-19
· Patented Case
Child
Claims priority from a provisional application
→
App. 12/218,080
· US 8,705,010
Filed 2008-07-11
· Patented Case
Child
Claims priority from a provisional application
→
App. 16/427,295
· US RE49,488
Filed 2019-05-30
· Patented Case
Child
Claims priority from a provisional application
→
App. 14/135,372
· US 9,665,013
Filed 2013-12-19
· Patented Case
COURT APPOINTMENT
Recorded 2019-05-07
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Quick Facts
- App. No.
- 60/959,531
- Filed
- 2007-07-13
External Links