Patent Application
Provisional
App. No. 61/015,498
· Confirmation No. 6593
METHODS FOR IN-SITU CHAMBER CLEANING PROCESS FOR HIGH VOLUME MANUFACTURE OR SEMICONDUCTOR MATERIALS
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-02-11 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2007-12-20 | TR.PROV |
Provisional Cover Sheet (SB16) | 2 | View | |
| 2007-12-20 | SPEC |
Specification | 24 | View | |
| 2007-12-20 | CLM |
Claims | 5 | View | |
| 2007-12-20 | ABST |
Abstract | 1 | View | |
| 2007-12-20 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2007-12-20 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2007-12-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Chantal Arena
Mesa, AZ
Christiaan J. Werkhoeven
Gilbert, AZ
Ronald Thomas Bertram JR.
Mesa, AZ
Andrew D. Johnson
Doyleston, PA
Vasil Vorsa
Coopersburg, PA
Robert Gordon Ridgeway
Quakertown, PA
Peter J. Maroulis
Quakertown, PA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 28765
- Docket No.
- 94717-4288
- Confirmation No.
- 6593
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 61/015,498
- Filed
- 2007-12-20
External Links