IP Library › Patent Application 12602740
Patent Application Utility PCT National Stage
App. No. 12/602,740 · Confirmation No. 8149

METHODS FOR IN-SITU CHAMBER CLEANING PROCESS FOR HIGH VOLUME MANUFACTURE OF SEMICONDUCTOR MATERIALS

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2012-07-03 WFEE Fee Worksheet (SB06) 2 View
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2012-07-03 ADS Application Data Sheet 6 View
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2012-07-03 WFEE Fee Worksheet (SB06) 1 View
2012-05-25 CTNF Non-Final Rejection 10 View
2012-05-25 892 List of references cited by examiner 1 View
2012-05-25 SRNT Examiner's search strategy and results 3 View
2012-05-25 FWCLM Index of Claims 1 View
2012-05-25 BIB Bibliographic Data Sheet 1 View
2012-05-25 SRFW Search information including classification, databases and other search related notes 1 View
2012-05-25 1449 List of References cited by applicant and considered by examiner 1 View
2012-05-25 1449 List of References cited by applicant and considered by examiner 1 View
2010-07-28 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2010-07-28 FOR Foreign Reference 13 View
2010-07-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-07-28 TRAN.LET Transmittal Letter 1 View
2010-07-26 A.PE Preliminary Amendment 1 View
2010-07-26 CLM Claims 3 View
2010-07-26 REM Applicant Arguments/Remarks Made in an Amendment 1 View
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2010-07-22 NTC.PUB Notice of Publication 1 View
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2010-04-14 M903 Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed 2 View
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2010-04-10 WFEE Fee Worksheet (SB06) 1 View
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2009-12-02 A.PE Preliminary Amendment 1 View
2009-12-02 SPEC Specification 1 View
2009-12-02 CLM Claims 3 View
2009-12-02 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2009-12-02 TRAN.LET Transmittal Letter 1 View
2009-12-02 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2009-12-02 FOR Foreign Reference 38 View
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2009-12-02 WFEE Fee Worksheet (SB06) 2 View
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2009-12-02 SPEC Specification 23 View
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2009-12-02 ABST Abstract 2 View
2009-12-02 ABST Abstract 2 View
2009-12-02 P.ART19.CLM Amendment to the claims under PCT Article 19 3 View
2009-12-02 P.ART19.STMT Copy/Translation of Statement Under PCT Article 19 2 View
2009-12-02 FRPR Certified Copy of Foreign Priority Application 39 View
2009-12-02 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
12/602,740
Filed
2009-12-02
Pub. No.
US20100180913A1
Art Unit
1711