Patent Application
Provisional
App. No. 61/028,321
· Confirmation No. 1890
TRENCH DEPTH MONITOR FOR SEMICONDUCTOR MANUFACTURING
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-03-05 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-02-13 | ADS |
Application Data Sheet | 5 | View | |
| 2008-02-13 | SPEC |
Specification | 9 | View | |
| 2008-02-13 | CLM |
Claims | 6 | View | |
| 2008-02-13 | ABST |
Abstract | 1 | View | |
| 2008-02-13 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2008-02-13 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-02-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Hugh J. Griffin
Newtownabbey, UNITED KINGDOM
Takeshi Ishiguro
Fukushima-ken, JAPAN
Kenji Sugiura
Kawasaki-shi, JAPAN
Attorneys & Agents of Record
Prosecution
- Customer No.
- 570
- Docket No.
- 681443-83US
- Confirmation No.
- 1890
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2009-01-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2008-04-14
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Quick Facts
- App. No.
- 61/028,321
- Filed
- 2008-02-13
External Links