Patent Application
Provisional
App. No. 61/057,891
· Confirmation No. 5320
Method of Forming Silicon Nitride or Silicon Oxynitride at Low Temperature
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-06-02 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2008-06-20 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-06-02 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2008-06-02 | SPEC |
Specification | 5 | View | |
| 2008-06-02 | CLM |
Claims | 3 | View | |
| 2008-06-02 | ABST |
Abstract | 1 | View | |
| 2008-06-02 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-06-02 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Liu Yang
Yorba, CA
Xinjian Lei
Vista, CA
Bing Han
Lansdale, PA
Manchao Xiao
San Diego, CA
Eugene Joseph Karwacki JR.
Orefield, PA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 143749
- Docket No.
- 07208Z USA
- Confirmation No.
- 5320
Child
PCT
Claims priority from a provisional application
→
PCT/US2009/046108
Filed 2009-06-03
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 13/624,190
· US 8,906,455
Filed 2012-09-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 12/476,734
· US 8,298,628
Filed 2009-06-02
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 61/057,891
- Filed
- 2008-06-02
External Links