Patent Application
Provisional
App. No. 61/078,599
· Confirmation No. 7486
METHOD AND SYSTEM FOR LITHOGRAPHY ILLUMINATOR OPTIMIZATION
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-07-30 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-07-07 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2008-07-07 | SPEC |
Specification | 72 | View | |
| 2008-07-07 | CLM |
Claims | 5 | View | |
| 2008-07-07 | ABST |
Abstract | 1 | View | |
| 2008-07-07 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2008-07-07 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-07-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20277
- Docket No.
- 055071-0677
- Confirmation No.
- 7486
Child
PCT
Claims priority from a provisional application
→
PCT/US2009/049792
Filed 2009-07-07
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 12/615,004
· US 10,025,198
Filed 2009-11-09
· Patented Case
Child
Claims priority from a provisional application
→
App. 13/003,294
· US 8,542,340
Filed 2011-01-07
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-04-23
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Quick Facts
- App. No.
- 61/078,599
- Filed
- 2008-07-07
External Links