IP Library › Patent Application 61113004
Patent Application Provisional Small
App. No. 61/113,004 · Confirmation No. 7503

METHODS AND SYSTEM FOR GAUGE DESIGN FOR LITHOGRAPHY CALIBRATION

Provisional Application Expired
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2009-12-18 APP.FILE.REC Filing Receipt 3 View
2009-12-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-12-09 PD.TO.AUTH Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office 1 View
2009-12-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-12-09 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2009-12-09 PA.. Power of Attorney 2 View
2009-08-21 PD.AUTH.NTC Notice that authorization for participating IP Offices to access US application was improper 1 View
2009-08-17 PD.TO.AUTH Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office 1 View
2009-08-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-12-17 APP.FILE.REC Filing Receipt 3 View
2008-11-10 SPEC Specification 46 View
2008-11-10 WFEE Fee Worksheet (SB06) 2 View
2008-11-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-11-10 TR.PROV Provisional Cover Sheet (SB16) 2 View
2008-11-10 DRW Drawings-only black and white line drawings 9 View
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Quick Facts
App. No.
61/113,004
Filed
2008-11-10